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Film
Thickness Measurement
These pages describe our film thickness measurement
technology using the white-light interference phenomenon. Our TranSpec and
FTM-Lite film thickness
gauges determine the film thickness of thin transparent layers in the the range of
~ 1
to 150
microns within an accuracy of ± 5 nanometer. |
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FTM-Lite ▪ Film Thickness Gauges
Our easy-to-use FTM-Lite film thickness gauges are designed especially for
manually performed but even though high-precise thickness measurements in
the lab. The handy instruments connect to any standard laptop using USB. |
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Plasma Emission Measurement
Our fiber optics coupled TranSpec spectrometers permit to trace almost any emission of your PVD
plasma in the
entire UV...NIR spectral
range, simultaneously and in real-time! This permits an intermediate feedback for your
process gas flow control and vaporization progress. |
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TranSpec ▪ Photodiode
Array Spectrometer
These pages show our UV-VIS-NIR
photodiode array spectrometer, which combine innovative optoelectronics with
high performance digital electronics. The TranSpec process spectrometers are
used mainly for film thickness and plasma emission measurement tasks. |
