We offer high-speed gauges for photodiode array spectroscopy, film thickness measurement and PVD plasma emission monitoring, specially for process measuring and control tasks. - Dipl.-Ing. (FH) Thomas Fuchs , Engineer's Office for Applied Spectroscopy TranSpec - Film Thickness Measurement and Plasma Monitoring

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TranSpec-DSP spectrometer in 19'' chassis

 


TranSpec-DSP Specifications
Dated April 2003, all information without guarantee, subject to changes:

  • Mechanical Construction
    • Standard 19'' chassis with 4 HU, EMI-protected, CE certificate
    • Dimensions: approx. 180 x 435 x 310 mm (H x W x D)
    • Weight: approx. 10 kg

  • Optical Components
    • Spectrometer modules of Carl Zeiss Germany, adaptation for standard FSMA fiber optics
    • Holographic created concave diffraction grating
    • Photodiode arrays with 256, 512 or 1024 pixel, no cooling required
    • Permanently adjusted modules, no mechanically moveable parts, free of maintenance
    • Module specific wavelength ranges: 200 - 1100 nm
    • Module specific spectral resolution: 3 - 10 nm
    • Module specific spectral pixel interval: approx. 0.8 - 3.3 nm
    • Absolute wavelength accuracy: < 0.3 nm
    • Temperature drift: typical < 0.005 nm / Kelvin

  • Analog/Digital Electronics
    • 1 MHz 16 bits AD-converter DATEL ADS 931 with sample & hold
    • Spurious-free dynamic range, no missing codes at 16 bits
    • Effectively useable conversion rate: 1 µs / pixel

  • Integrated System Electronics
    • 32 bits Texas Instruments Digital Signal Processor TMS320C44 with 60 MHz
    • 2 Mbytes (optionally 8 Mbytes) SRAM for real-time spectra recorder, 3600 spectra at 256 diodes
    • 7-channel TTL trigger input and output, typical 1 µs
    • TTL shutter control for DSL-1 deuterium and HSL-2 halogen spectral lamp
    • TTL bulb burn control for HSL-2 halogen spectral lamp
    • Optionally 4-channel D/A-output, 14 bits at 60 kHz
    • Link/RS-422 interface adapter board and cable for the PC

  • Spectra Scanning
    • Shortest integration time: 0.4 ms at 256 pixel - 0.7 ms at 512 pixel - 1.2 ms at 1024 pixel
    • Longest integration time: 5 seconds, selectable in steps of  0.1 ms
    • Absolute accuracy of the integration time: ± 1 µs max.
    • Response time to interrupt the integration (TTL trigger): < 1 ms, controlled by software
    • Total system noise (standard deviation, dark current at 10 ms):
      5 counts/without averaging, 1 count/25 measurements
    • Real-date and -time stamping of every spectrum within a resolution of 1 µs

      Repetition rates, loss-free while continuous scanning, including possible
      dark current correction and/or averaging:

        PDA with   256 pixel:   2,500 spectra / second (corresponding to 0.4 ms integration time)
        PDA with   512 pixel:   1,428 spectra / second (corresponding to 0.7 ms integration time)
        PDA with 1024 pixel:      833 spectra / second (corresponding to 1.2 ms integration time)
 
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This Website was edited last on February 12, 2008

© Copyright 1998-2008 by Thomas Fuchs, Engineer's Office for Applied Spectroscopy, Germany


Company: 

Ing.-Buero Thomas Fuchs

Street Address: 

Bischof-Fischer-Str. 108

Zip and City:  

73430 Aalen - Germany

Phone Number: 

+49  (0)7361 - 97 53 28 0

Fax Number: 

+49  (0)7361 - 97 53 28 5

E-Mail: 

sales@applied-spectroscopy.com

VAT-ID: 

DE 167178636

WEEE-Reg. No.: 

DE 93698084