We offer high-speed gauges for photodiode array spectroscopy, film thickness measurement and PVD plasma emission monitoring, specially for process measuring and control tasks. - Dipl.-Ing. (FH) Thomas Fuchs , Engineer's Office for Applied Spectroscopy TranSpec - Film Thickness Measurement and Plasma Monitoring

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Plasma Emission Measurement --- Observe your PVD-Plasma in the complete UV...NIR Range --- Simultaneously!

 
An objectively and continuously process control of low-pressure plasma deposition techniques, such as PVD (Physical Vapor Deposition), is one of the real issues today. Aside from a visual examination of the plasma's light emission, sometimes the mass spectroscopy technique is used. Especially the mass spectroscopy is neither handy to operate nor the results are easy to interpret. Compared with this, the benefits of using the OES (Optical Emission Spectroscopy) and our fiber optics coupled TranSpec-DSP spectrometers are obvious.
 


Technology Features

Simultaneous Measurement in the Spectral Range 200...1000 nm
Detection of even Very Low Emission Intensities
Connectable to almost every Vacuum Chamber
Maintenance-Free and Easy-to-Use Technology
Comfortable System Software TranSpec 2000

Plasma Emission Measurement  - Application Note  Plasma Emission Measurement Application Note as PDF file


    Schematic Gauge Setup

The plasma emission is captured inside the chamber through a special, flexible vacuum fiber optics cable, which is connected by a flange with another fiber light guide outside the chamber.

Note that, due to the use of these flexible vacuum fiber optics, the light emission can be observed also at different positions in front of the plasma!

TranSpec Gauge for Plasma Emission Measurement

The picture right beside shows a vacuum fiber feed-thru with a KF-50 flange and two FSMA adapters in order to connect a vacuum and a regular fiber.

Vacuum Feed-Thru with connected Fibers

 

    Additional Links

TranSpec 2000 Software
TranSpec-DSP Spectrometer
Brochures and Application Notes as PDF Files

WB00677_.gif (630 bytes) Back to Home Page

 


This Website was edited last on February 12, 2008

© Copyright 1998-2008 by Thomas Fuchs, Engineer's Office for Applied Spectroscopy, Germany


Company: 

Ing.-Buero Thomas Fuchs

Street Address: 

Bischof-Fischer-Str. 108

Zip and City:  

73430 Aalen - Germany

Phone Number: 

+49  (0)7361 - 97 53 28 0

Fax Number: 

+49  (0)7361 - 97 53 28 5

E-Mail: 

sales@applied-spectroscopy.com

VAT-ID: 

DE 167178636

WEEE-Reg. No.: 

DE 93698084