Engineer's Office for Applied Spectroscopy


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An objectively and continuously process control of low-pressure plasma deposition techniques, such as PVD (Physical Vapor Deposition), is one of the real issues today. Aside from a visual examination of the plasma's light emission, sometimes the mass spectroscopy technique is used. Especially the mass spectroscopy is neither handy to operate nor the results are easy to interpret. Compared with this, the benefits of using the OES (Optical Emission Spectroscopy) and our fiber optics coupled TranSpec Spectrometers are obvious:
 


Bullet-Blue.gif (925 bytes) Technology Features
Simultaneous measurement in the spectral range ~ 200...1000 nm
Detection of even very low emission intensities
Connectable to almost every vacuum chamber
Maintenance-free technology - No Wavelength Re-Calibration required !
  Comfortable and easy-to-use software PEM-ProVis Professional

 

Download Application Note: 


Schematic Gauge Setup
 

The plasma emission is captured inside the chamber through a special, flexible vacuum fiber optics cable, which is connected by a flange with another fiber light guide outside the chamber.

Note that, due to the use of these flexible vacuum fiber optics, the light emission can be observed also at different positions in front of the plasma!


TranSpec schematic gauge setup
 

 

The picture right beside shows a vacuum fiber feed-thru with a KF-50 flange and two FSMA adapters in order to connect a vacuum fiber inside the chamber and a regular fiber outside the chamber, which goes towards the TranSpec spectrometer.


KF-50 flange with FSMA / FSMA adapter


This Website was edited last on January 17, 2017

Copyright 1998-2017 by Thomas Fuchs, Engineer's Office for Applied Spectroscopy, Germany


Company:

  Ing.-Buero Thomas Fuchs

Street Address: 

  Bischof-Fischer-Str. 108

Zip and City:

  73430 Aalen - Germany

Phone Number:

  +49  (0)7361 - 97 53 28 0

Fax Number:

  +49  (0)7361 - 97 53 28 5

E-Mail: 

  sales@applied-spectroscopy.com

VAT-ID:

  DE 167178636

WEEE-Reg. No.:

  DE 93698084