The film thickness software FTM-ProVis 2000 has been developed especially for in-line process control requirements. For example, the actual measuring sensor can be moved in cross-direction to the web coating machine with the help of a single axis scanning bridge (see the application example Film Thickness Measurement on Web Coating Machines).

The pictures shows a 3D film thickness profile of a photoresist
layer measured fully automated using a 3-axes scanning bridge

This Website was edited last on February 12, 2008

© Copyright 1998-2008 by Thomas Fuchs, Engineer's Office for Applied Spectroscopy, Germany

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