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The
FTM-Micro film thickness gauge uses the same white-light interference
phenomenon for non-contact film thickness measurement of transparent layers
as our TranSpec and FTM-Lite instruments. In order to determine the
thickness on very small spots, however, the FTM-Micro instrument uses a
fiber optics coupled microscope with live camera view.
The fiber optics coupled
microscope reduces the film thickness measurement spot size down to
approximately 50-100 micrometers, depending on the selected magnification.
The measurement spot image is viewed in real-time by a special color camera
assembled to the microscope.
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