We offer high-speed gauges for photodiode array spectroscopy, film thickness measurement and PVD plasma emission monitoring, specially for process measuring and control tasks. - Dipl.-Ing. (FH) Thomas Fuchs , Engineer's Office for Applied Spectroscopy TranSpec - Film Thickness Measurement and Plasma Monitoring

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Film Thickness Measurement --- Non-Contact and Non-Destructive --- 0.1-150 Microns in Realtime!

Bullet-Blue.gif (925 bytes) Technology Features
Optical method:  non-contact, non-destructive and no Beta radiation
Fast measurement and film thickness evaluation - within milliseconds!
Wide thickness measurement range:  0.1 to 150 µm ( 0.004 to 6 mil )
High accuracy:  typically better ± 0.005 µm over the entire range
Simultaneous determination of double-layers possible
Motion bridge controlled measurement on web coaters possible
Comfortable and easy-to-use software FTM-ProVis Lite and FTM-ProVis 2000



Film Thickness Measurement - Application Note   Film Thickness Measurement Application Note as PDF file



Bullet-Blue.gif (925 bytes) Application Examples

Protective Lacquer Coatings
3D Film Thickness Profile of a CD-Lacquer
Click on the image
for a large picture
Film thickness measurement of dry or even wet lacquer coatings, with the possibility of a simultaneous two-layer measurement. Our technology is used by the world's leading manufacturers of Automobile Headlights and Compact-Discs.The picture shows a 3D film thickness profile of the protective lacquer of a standard commercial Compact-Disc in the range of 9-13 microns.

Vapor Deposition (e.g. Parylene) and Photo Resist Layers
3D Film Thickness Profile of a Diamond Layer
Click on the image
for a large picture
The highly precise technology of our thickness gauges determine the film thickness of even sub-micron layer structures. The picture shows a 3D film thickness profile of a 10 mm² diamond layer on silicon in the thickness range of 800-1000 nanometers.

Web Coating of Wrapping Foils and other
Film Thickness Measurement on Web Coaters
Click on the image
for a large picture
The film thickness profiles of web produced or coated foils can be determined in cross- and/or machine-direction by using a scanning bridge and our film thickness gauges. This permits an intermediate feedback for your process and production control. The picture shows a schematic gauge setup for film thickness measurement on a web coating or foil machine.



Bullet-Blue.gif (925 bytes) Measurement Method Principles

A commonly well-known effect, which occurs for example with soap bubbles or on a thin oil film on water, is used for the determination of the film thickness. You can see many colors which change according to the layer thickness, e.g. when a soap bubble is blown up. Also check out this Soap Bubble Web site for some nice pictures and more detailed explanation of this effect!

These "colors at thin layers" are based on the interference phenomenon, i.e. on the superposition of light waves, which have been reflected at the front and back side of the layer (at two boundaries with different optical densities).

The Interference Model
The Interference Model

The undisturbed superposition of the two reflected light rays 1 and 2 leads to periodical amplifications and extinction in the spectrum of a white continuum light source (such as a halogen spectral lamp as a pseudo white-light source).


Since the superposition of the two light rays is not purely additive, a so-called interference occurs. The figure at the right shows the interference spectrum of a 1 µm (top) and a 2 µm (bottom) layer.

 

Examples of Interference Spectra
Examples of Interference Spectra


Bullet-Blue.gif (925 bytes) Film Thickness Gauge and Measurement Setup

The interference spectra of thin transparent or semi-transparent layers are measured and analyzed by our TranSpec-DSP Spectrometer and HSL-2 Halogen Spectral Lamp, as shown in the schematic figure below. The same setup applies to our new FTM-Lite Film Thickness Gauges.

The sample is illuminated through a bifurcated fiber optics cable, which is connected to the spectrometer and a halogen lamp.  The reflected interference spectrum is guided back to the spectrometer, where the spectrum is analyzed and the film thickness is computed.

TranSpec Film Thickness Gauge
Click on the image
for a large picture

Gauge Setup for Film Thickness Measurement
Film Thickness Measurement Setup


Bullet-Blue.gif (925 bytes) Additional Links

FTM-Lite Film Thickness Gauges for USB 2.0
TranSpec-DSP Spectrometer
HSL-2 Halogen Spectral Lamp
FTM-ProVis 2000 Software
Brochures and Application Notes as PDF Files


WB00677_.gif (630 bytes) Back to Home Page

 


This Website was edited last on February 12, 2008

© Copyright 1998-2008 by Thomas Fuchs, Engineer's Office for Applied Spectroscopy, Germany


Company: 

Ing.-Buero Thomas Fuchs

Street Address: 

Bischof-Fischer-Str. 108

Zip and City:  

73430 Aalen - Germany

Phone Number: 

+49  (0)7361 - 97 53 28 0

Fax Number: 

+49  (0)7361 - 97 53 28 5

E-Mail: 

sales@applied-spectroscopy.com

VAT-ID: 

DE 167178636

WEEE-Reg. No.: 

DE 93698084